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Microelectromechanical Devices > UBCO in house processes > Flashcards

UBCO in house processes Flashcards

Microelectromechanical Devices (12 decks)

Scaling Effects

Surface Micromachining

Thermal Actuators

Electrostatic Actuators and Sensors

Characterization

Silicon Production and Crystallography

Bulk micromachining

UBCO in house processes

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