Metrology needs Flashcards
Measurement of critical dimensions (CDs)
CDs are the dimensions of features in semiconductor devices. They are critical for determining the performance and reliability of the devices.
The critical dimensions [CD]of semiconductors are constantly decreasing, which allows for the development of smaller, faster, and more powerful semiconductor chips. More CD in this deck
Measurement of film thickness
Film thickness is the thickness of layers in semiconductor devices. It is critical for determining the electrical properties of the devices.
Measurement of dopant concentration
Dopant concentration is the concentration of dopants in semiconductor devices. Dopants are impurities that are added to semiconductor materials to control their electrical properties.
Measurement of surface roughness
Surface roughness is the roughness of the surface of semiconductor devices. It can affect the performance and reliability of the devices
Measurement of defects
Defects are imperfections in semiconductor devices. They can cause the devices to fail.
CD Includes Feature Size
The feature size is the smallest feature that can be fabricated on a semiconductor chip. It is typically measured in nanometers (nm). The feature size has been decreasing steadily over the past few decades, and it is now in the range of 10-20 nm.
CD includes Gate Length
The gate length is the length of the gate in a transistor. It is also typically measured in nanometers. The gate length is important because it determines the speed of the transistor.
CD includes Pitch
The pitch is the distance between adjacent features on a semiconductor chip. It is also typically measured in nanometers. The pitch is important because it determines the density of the transistors on the chip.
CD Includes Line width
The line width is the width of a metal line on a semiconductor chip. It is also typically measured in nanometers. The line width is important because it determines the resistance of the metal line.
CD Includes Contact size
The contact size is the size of the contact between a metal line and a semiconductor region. It is also typically measured in nanometers. The contact size is important because it determines the resistance of the contact.
