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Microelectromechanical Devices
> Beam Theory > Flashcards
Beam Theory Flashcards
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Microelectromechanical Devices
(12 decks)
Scaling Effects
Lithography
Surface Micromachining
Deposition
Dry Etch
Beam Theory
Thermal Actuators
Electrostatic Actuators and Sensors
Characterization
Silicon Production and Crystallography
Bulk micromachining
UBCO in house processes
