Fundamentals of Vacuum

Question 1

Gasses in Viscous Flow generally move _______ than gasses in Molecular Flow.

Answer 1

Faster

Question 2

The definition of vacuum refers to a given space filled with a gas at pressures ________ atmospheric pressure.

Answer 2

below

Question 3

Turbulent Flow is highly desirable in a process chamber with production wafers in it to help knock particles off of the wafers to keep them clean.

Answer 3

False

Question 4

The function of a vacuum pump for wafer processing is to _________ the gas density in a given volume.

Answer 4

Reduce

Question 5

Wafer process chambers are made of materials that have a _______ vapor pressure.

Answer 5

Low

Question 6

At Viscous flow, the mean free path of molecules is _____________ than that of molecules at molecular flow.

Answer 6

Shorter

Question 7

The fundamental vacuum seal is provided by ________________.

Answer 7

O-Rings

Question 8

On top of Mount Everest, the atmospheric pressure is ___________ than at sea level.

Answer 8

Lower

Question 9

Many semiconductor processes are done under vacuum mainly to ______________.

Answer 9

Reduce the number of unwanted chemical reactions

Question 10

Gasses in Molecular Flow are _______ likely to collide with each other than the chamber walls

Answer 10

Less

Question 11

Safety considerations in a wafer vacuum system include:.

Answer 11

Electrical
Weight
Gas handling
All of the above