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1
Q

Cleanscrub1 with CP72B

A

ZWFSCRB1 and B2

AKA: Yes 450-PB8 Vacuum Bake Oven

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2
Q

PreMetalDeposition Bake VacBakeTI

A

ZOVEN21, 22, 23

AKA: Yes 450-PB8 Vacuum Bake Oven; Vacuum Bake

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3
Q

Cont Metal Deposition Ti:

A

ZSPUTR09

AKA: AMAT Endura HP Sputter System; Metal Sputter Deposition

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4
Q

Foil Bond

A

ZLSRBND02 ZLSRBND03 ZLSRBND05

AKA: 8451 ILT Laser Bonder Model 5000; 8539 ILT Laser Bonder Model 5000;
8700 ILT Laser Bonder

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5
Q

FOL Laser Scribe:

A

ZLASRMK3

AKA: Coherent-Rofin Waferlase 200D Marker UV SPECTRUM LSR MKR

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6
Q

Clean Scrub2.0 with CP72B

A

ZWFSCRB1
ZWFSCRB2

AKA: Lam Ontrak Series 1 Wafer Scrubber Lam Ontrak DSS-200 Series 2? Wafer Scrubber

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7
Q

PreMetal Dep BAKE VacBakeM1

A

ZOVEN21 ZOVEN22 ZOVEN23

AKA: Yes 450-PB8 Vacuum Bake Oven Yes 450-PB8 Vacuum Bake Oven

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8
Q

M1 Metal Deposition:

A

ZSPUTR09 ZSPUTR12

AKA: AMAT Endura HP Sputter System AlCu Deposition

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9
Q

M1 Photo Coat Bake:

A

ZCODEV04 ZCODEV06

AKA: TEL Clean Track Mark7 Coater Developer System; Coat

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10
Q

M1 Align Expose:

A

ZALIGN15 ZALIGN16

AKA: EVG IQ Aligner/TBR 300 Neutronix-Quintel NXQ 8008 Mask Aligner

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11
Q

M1 Photo Develop:

A

ZCODEV04 ZCODEV06

AKA: TEL Clean Track Mark7 Coater Developer System; Develop

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12
Q

M1 ADI

A

ZINSP71

AKA: Nikon NWL-860 Wafer Microscope System; Develop Inspection

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13
Q

M1 Descum:

A

ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26

AKA: Gasonics Pep 3510 Plasma Asher Trymax NEO2120 Plasma Stripper

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14
Q

M1 Wet Etch Al:

A

ZSTRIP12B

AKA: SVP Wet Hood Right Tank Aluminum 16:1:1:2 Wet Etch

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15
Q

M1 AEI

A

ZINSP72

AKA: Nikon NWL-860 Wafer Microscope System Expose Inspection

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16
Q

M1 Strip Resist Photo

A

ZCODEV04

AKA: TEL Clean Track Mark7 Coater Developer System Photo Strip

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17
Q

M1 Strip Resist Dry:

A

ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26

AKA: Gasonics Pep 3510 Plasma Asher; Trymax NEO2120 Plasma Stripper

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18
Q

M1 ACI

A

ZINSP72

AKA: Nikon NWL-860 Wafer Microscope System; Clean Inspection

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19
Q

VIA1 Dielectric Deposition:

A

ZPECVD14 ZPECVD15

AKA: Novellus Glassivation System; PECVD

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20
Q

VIA1 Photo Prime Coat Bake:

A

ZCODEV04 ZCODEV06

AKA: TEL Clean Track Mark7 Coater Developer System; APF Photoresist Track

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21
Q

VIA1 Align Expose

A

ZALIGN15 ZALIGN16

AKA: EVG IQ Aligner/TBR 300 Neutronix-Quintel NXQ 8008 Mask Aligner

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22
Q

VIA1 Photo Develop

A

ZCODEV04 ZCODEV06

AKA: TEL Clean Track Mark7 Coater Developer System Develop

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23
Q

VIA1 ADI

A

ZINSP70

AKA: Nikon NWL-860 Wafer Microscope System; Develop Inspection

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24
Q

VIA1 Descum

A

ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26

AKA: Gasonics Pep 3510 Plasma Asher; Trymax NEO2120 Plasma Stripper

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25
VIA1 Dry Etch (D19)
ZETCHD19; ZETCHD14 AKA: LAM 4520i Rainbow Oxide Etcher; Oxide etch
26
VIA1 AEI Inspection
ZINSP72 AKA: Nikon Eclipse microscope; inspection
27
VIA1 Strip Resist Dry
ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26 AKA: Gasonics Pep 3510 Plasma Asher; Trymax NEO2120 Plasma Stripper
28
VIA1 WetEtch Defreckle
ZCLEAN47B AKA: Wet Etch Clean Hood Tank B; Defreckle
29
VIA1 ACI
ZINSP72 AKA: Nikon NWL-860 Wafer Microscope System; Clean Inspection
30
M2 Metal Deposition
ZSPUTR09 ZSPUTR12 AKA: AMAT Endura HP Sputter System; AlCu Deposition
31
M2 Photo Coat Bake
ZCODEV04 ZCODEV06 AKA: TEL Clean Track Mark7 Coater Developer System; Coat
32
M2 Align Expose
ZALIGN15 ZALIGN16 AKA: EVG IQ Aligner/TBR 300; NEUTRONIX-QUINTEL NXQ 8008 Mask Aligner
33
M2 Photo Develop
ZCODEV04 ZCODEV06 AKA: TEL Clean Track Mark7 Coater Developer System; Develop
34
M2 ADI
ZINSP72 AKA: Nikon NWL-860 Wafer Microscope System Develop Inspection
35
M2 Descum
ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26 AKA: Gasonics Pep 3510 Plasma Asher Trymax NEO2120 Plasma Stripper
36
M2 Wet Etch Al
ZSTRIP12B AKA: Sun Valley Plastics Heated Quartz Bath; Al 16:1:1:2 Wet Etch
37
N/A
N/A
38
M2 Strip Resist Photo
ZCODEV04 AKA: TEL Clean Track Mark7 Coater Developer System; Photo Strip
39
VIA2 Wet Etch Defreckle
ZCLEAN47B AKA: Sun Valley Plastics Heated Quartz Bath - Acid Hood Tank B; Defreckle
40
VIA2 ACI
ZINSP72 AKA: Nikon NWL-860 Wafer Microscope System; Clean Inspection
41
Padstack Metal Deposition
ZSPUTR09 ZSPUTR12 AKA: AMAT Endura HP Sputter System; Ti / NiV / Au Deposition
42
Padstack Photo Coat Bake
ZCODEV04 ZCODEV06 AKA: TEL Clean Track Mark7 Coater Developer System; Coat Track
43
Padstack Align Expose
ZALIGN15 ZALIGN16 AKA: EVG IQ Aligner/TBR 300; Neutronix-Quintel NXQ 8008 Mask Aligner
44
Padstack Photo Develop
ZCODEV04 ZCODEV06 AKA: TEL Clean Track Mark7 Coater Developer System; Develop
45
Padstack ADI
ZINSP71 AKA: Nikon NWL-860 Wafer Microscope System; Develop Inspection
46
Padstack Descum
ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26
47
Padstack Wet Etch Au
ZETCHW22 AKA: gold etch; CRP Wet Etch Hood
48
Padstack1 AEI
ZINSP72 AKA: Nikon NWL-860 Wafer Microscope System; Expose Inspection
49
Padstack Wet Etch NiV
ZETCHW23 AKA: NiV etch; CRP Wet Etch Hood
50
Padstack Dry Etch
ZETCHD21, 15 AKA: LAM 9600 TCP Metal Etcher; NiV Dry Etch
51
N/A
N/A
52
Padstack Strip Resist Wet
ZSTRIP21 PLUS SRD AKA: ST-22; Fab Etch
53
Padstack ACI
ZINSP72 AKA: Nikon Eclipse microscope; Clean Inspection
54
IC Protect Coat
ZCOTCLEN01 AKA: Süss ACS200 (Coat/Clean); Coater
55
IC Protect Bond
ZBNDDBN01 AKA: Süss XBS200 (Bond/Debond); Bonder
56
Antenna Metal Deposition Au (GOLD)
ZSPUTR09 ZSPUTR12 AKA: AMAT Endura HP Sputter System; gold dep
57
Antenna Photo Coat Bake
ZCODEV04C ZCODEV06C AKA: TEL Clean Track Mark7 Coater Developer System; Coat Track
58
Antenna Align Expose
ZALIGN15 ZALIGN16 AKA: EVG IQ Aligner/TBR 300; Neutronix-Quintel NXQ 8008 Mask Aligner
59
Antenna Photo Develop
ZCODEV04D ZCODEV06D AKA: TEL Clean Track Mark7 Coater Developer System; Develop
60
Antenna ADI
ZINSP72 AKA: Nikon NWL-860 Wafer Microscope System; Develop Inspection
61
Antenna Wet Etch1 Au
ZETCHW22 AKA: gold etch; CRP Wet Etch Hood
62
Antenna Wet Etch TiFoil
ZETCHW25 AKA: TiFoil etch; SPEC SBXAT3-60 Automated HF Wet Hood
63
Antenna AEI
ZINSP72 AKA: Nikon NWL-860 Wafer Microscope System; Expose Inspection
64
Antenna Strip Resist Wet
ZSTRIP21 AKA: ST-22; Fab Etch
65
Antenna Wet Etch2 Au
ZETCHW22 AKA: gold etch; CRP Wet Etch Hood
66
Antenna ACI
ZINSP72 AKA: Nikon Eclipse microscope; Clean Inspection
67
Electrode Metal Deposition Ti
ZSPUTR09 ZSPUTR12 AKA: AMAT Endura HP Sputter System; Ti Deposition
68
Electrode Metal Deposition TiN
ZSPUTR09 ZSPUTR12 AKA: AMAT Endura HP Sputter System, TiN Deposition
69
Electrode Spray Coat & Bake
ZCOAT09 ZCOAT10 AKA: EVG120 Automated Spray Coater; Spray Coat
70
Electrode Align Expose
ZALIGN15 ZALIGN16 AKA: EVG IQ Aligner/TBR 300; Neutronix-Quintel NXQ 8008 Mask Aligner
71
Electrode Photo Develop
ZCODEV04D ZCODEV06D AKA: TEL Clean Track Mark7 Coater Developer System; Develop
72
Electrode ADI
ZINSP71 AKA: Nikon NWL-860 Wafer Microscope System; Develop Inspection
73
Electrode DryEtch TiN
ZETCHD21, 15 AKA: LAM 9600 TCP Metal Etcher; TiN Dry Etch
74
SRD
ZCLEAN34 AKA: OEM Group SRD (Semitool Rinse Dryer); Semitool Rinse Dryer - Wafer Clean and Dry
75
Electrode ACI
ZINSP72 AKA: Nikon Eclipse microscope; Clean Inspection
76
IC Protect Debond
ZBNDDBND01; ZBNDDBND02 AKA: Suss XBS200 Bond and Debond Module; Debond
77
IC Protect Clean
ZCOTCLEN01; also in Hood AKA: Suss ACS Clean and Coat Module; Clean
78
N/A
N/A
79
Wafer Scribe
ZLASRMK3 AKA: Coherent-Rofin Waferlase 200D Marker UV SPECTRUM LSR MKR; Wafer Scribe
80
ViaImageFab.0
ZEVAL71 AKA: Nikon VMZ-3020TZ Optical Measurement; Via Evaluation
81
ViaImageFab.0
ZEVAL71 AKA: Nikon VMZ-3020TZ Optical Measurement; Via Evaluation
82
N/A
N/A
83
Test Keithley PCM
ZAUTOP10 AKA: Keithley S530/Accretech UF2000 Parametric Test System
84
Test KS Keithley Site
ZAUTOP10 AKA: Site Test; Keithley S530/Accretech UF2000 Parametric Test System
85
Engr Dispo FAB1
DISPO
86
Post Keithley Adj
AUTOMATION AKA: adjust; Fab Automation Adjustment
87
Merge Review Fab
ZAUTOP10 AKA: end of fab; Keithley S530/Accretech UF2000 Parametric Test System
88
N/A
N/A
89
Solder Dispense (SMT)
ZAUTOP10 AKA: Datacon; Keithley S530/Accretech UF2000 Parametric Test System
90
Component Placement Reflow
ZAUTOP10 AKA: Reflow Oven; Keithley S530/Accretech UF2000 Parametric Test System
91
Stop Continuous Flow2
ZAUTOP10 AKA: Keithley S530/Accretech UF2000 Parametric Test System
92
SMT Visual
ZSMTINSP38 AKA: microscope; inspection
93
Post SMT Clean
ZCLEAN63A AKA: Class One; Trident Solvent Spray Tool
94
VIA Image SMT Nikon
ZEVAL71 ZEVAL75 AKA: Nikon VMZ-3020TZ Optical Measurement
95
VIA Inspect SMT
TABLE690 TABLE812 AKA: Sovella; Via Deposition Station
96
Test WP SPEA FAB
PSPEA07 AKA: SPEA test
97
N/A
N/A
98
Post SPEA Adj
AUTOMATION AKA: Adjust
99
Prod Review
MERGE REVIEW
100
Post SPEA Clean
ZCLEAN63 AKA: Class One; Trident Solvent Spray Tool
101
Bond Pre Bake
ZBNDOVEN01 ZBNDOVEN02 AKA: Pre Battery - Bond Oven Bake; VWR 1330GM Oven
102
Backfill
ZBKFILL01 AKA: Helium backfill
103
Start Continuous Flow3: Battery Bond
ZLSRBND03; ZLSRBND04; ZLSRBND05 AKA: ILT 8539 Laser Bonder; ILT 8624; ILT 8700
104
Battery Bondwidth Inspection
ZLBINSP02 AKA: Leica
105
FINAL DEVICE: Sapphire Singulation
ZZLSRSNG01 and 02 AKA: ILT; Singulation
106
Sapphire Shaping
ZZSHAPE01 and 02 AKA: Shape
107
Post Shape Cleaning
ZZCLEAN01
108
Shape Metrology
Post shape metrology
109
Fine Leak Test
ZZHEBOMB01 and 02 AKA: Helium Bomb
110
Gross Leak Test
ZZLEAK01 and 02 AKA: Leak Test; Pernicka01 and 02
111
Accelerometer: Hyperion
PHXHDT 001 and 006
112
Device Test- FInal Functional Titan
PHXDTS 001; PHXDTS 006
113
Final Inspection
QNIINSP01
114
Battery Prep
Battery Grind (ZBPGRND01) Post Grind Clean (ZBPCLEAN01) AKA Ransohoff Deburr Inspect (ZBPINSP01 and 03) Battery Polish (ZBPPLSH01 and 02) Polish Clean (ZBPCLEAN02) AKA Axus Cleaner
115
Battery Assembly (FAB)
Post polish Clean Inspect (ZBPKINSP02 and 01) Cavity Height Inspection (ZEVAL 73 and 76) AKA Keyence Flatness Inspection AKa Zygo WeldInspectIonograph (ZBECWELD 02 and 01)
116
VIA1 Descum
ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26 AKA: Gasonics Pep 3510 Plasma Asher; Trymax NEO2120 Plasma Stripper
117
VIA1 Descum
ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26 AKA: Gasonics Pep 3510 Plasma Asher; Trymax NEO2120 Plasma Stripper
118
VIA1 Descum
ZSTRIP22L ZSTRIP22R ZSTRIP24 ZSTRIP26 AKA: Gasonics Pep 3510 Plasma Asher; Trymax NEO2120 Plasma Stripper

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