Chamber Type Specifics Flashcards
Learn what each type of chamber does (20 cards)
1
Q
Syndion (LAM)
A
2
Q
Metal M (LAM)
A
3
Q
Strip45 (LAM)
A
4
Q
Kiyo FX (LAM)
A
5
Q
Metal NXP (LAM)
A
6
Q
Flex EL (LAM)
A
7
Q
Kiyo EX (LAM)
A
8
Q
Flex FL (LAM)
A
9
Q
Kiyo GX (LAM)
A
10
Q
Syndion GP (LAM)
A
11
Q
Coronus (LAM)
A
12
Q
PECVD (LAM)
A
13
Q
IBE (LAM)
A
14
Q
Syndion GS (LAM)
A
15
Q
ACTIA etcher (TEL)
A
16
Q
zX etcher (TEL)
A
17
Q
RLSA CVD (TEL)
A
18
Q
RK7 etcher
A
19
Q
Vigus Tx
A
20
Q
Mesa2-A/Mesa2-B
A
