Memorize Tool Chamber Types (FEOL/BEOL and Type)

Question 1

LGE01 chamber type? FEOL/BEOL?

Answer 1

PM1 - Kiyo FX (FEOL)
PM2 - Metal NXP (BEOL)
PM3 - Flex EL (BEOL)

Question 2

LGE02 chamber type? FEOL/BEOL?

Answer 2

PM1 - Syndion (BEOL)
PM2 - Metal M (BEOL)
PM3 - Metal M (BEOL)
PM4 -Strip45 (BEOL)

Question 3

LGE03 chamber type? FEOL/BEOL?

Answer 3

PM1 - Kiyo Ex (FEOL)
PM2 - Kiyo Fx (FEOL)
PM3 - Kiyo Ex (FEOL)

Question 4

LGE04 chamber type? FEOL/BEOL?

Answer 4

PM2 - Flex FL (FEOL)

Question 5

LGE05 chamber type? FEOL/BEOL?

Answer 5

PM1 - Kiyo GX (FEOL)
PM2 - Kiyo GX (BEOL)
PM3 - Syndion GP (BEOL)

Question 6

LGE07 chamber type? FEOL/BEOL?

Answer 6

PM1 - RIE (BEOL)
PM3 - IBE (BEOL)
PM4 - Coronus/Bevel (BEOL)
PM5 - PECVD (BEOL)

Question 7

LGE08 chamber type? FEOL/BEOL?

Answer 7

PM1 - Metal M (BEOL)
PM2 - Metal M (BEOL)
PM3 - Syndion GS (BEOL/FEOL)
PM4 - Strip45 (FEOL)

Question 8

TGE01 chamber type? FEOL/BEOL?

Answer 8

PM1 - MOL
PM4 - BEOL
PM5 - BEOL
PM6 - BEOL

Question 9

TGE02 chamber type? FEOL/BEOL?

Answer 9

PM1 - BEOL
PM2 - BEOL
PM5 - BEOL
PM6 - BEOL

Question 10

TGE03 chamber type? FEOL/BEOL?

Answer 10

PM1 - FEOL
PM2 - BEOL
PM5 - FEOL
PM6 - BEOL

Question 11

TGE04 chamber type? FEOL/BEOL?

Answer 11

PM1 - BEOL
PM2 - FEOL
PM5 - FEOL/BEOL
PM6 - FEOL

Question 12

TGE05 chamber type? FEOL/BEOL?

Answer 12

PM1 - BEOL
PM3 - FEOL
PM5 - FEOL
PM6 - FEOL

Question 13

CGE01 chamber type? FEOL/BEOL?

Answer 13

FEOL

Question 14

CGE02 chamber type? FEOL/BEOL?

Answer 14

BEOL

Question 15

MNE01 chamber type? FEOL/BEOL?

Answer 15

ChA - BEOL
ChC - BEOL

Question 16

MNE02 chamber type? FEOL/BEOL?

Answer 16

ChA - Advantage DPS2 (FEOL)
ChB/C/D - META

Question 17

TNE04 chamber type? FEOL/BEOL?

Answer 17

(No MPS)

Question 18

TNE09 chamber type? FEOL/BEOL?

Answer 18

PM1 - ACTIA etcher (FEOL)
PM2 - ACTIA etcher (BEOL)
PM3 - zX etcher (BEOL)
PM6 - RLSA CVD (BEOL)

Question 19

TNE10 chamber type? FEOL/BEOL?

Answer 19

PM1 - ACTIA etcher (BEOL)
PM3 - RK7 etcher (FEOL)
PM4 - ACTIA etcher (FEOL)
PM5 - ACTIA etcher (FEOL)
PM6 - Vigus Tx (FEOL)

Question 20

CSE101 chamber type? FEOL/BEOL?

Answer 20

Mesa2-A - C4
Mesa2-B - C4
(Wafers must be transferred to C4 FOUP before processing on CSE101, technically BEOL)