SDG: TRXF b Flashcards
(80 cards)
1
Q
Overview
A
2
Q
Qualitative analysis: Spectra interpretation
A
3
Q
Principal peaks of X-ray Spectra according to Atomic Number Z
A
4
Q
Step 1:
A
5
Q
Step 2:
A
6
Q
Step 3
A
7
Q
Fingerprint analysis
A
8
Q
Evaluating Spectra
A
9
Q
K & L Spectral Peaks
A
10
Q
Scatter
A
11
Q
Rayleigh Scatter
A
12
Q
Compton Scatter
A
13
Q
Sum Peaks
A
14
Q
Escape Peaks
A
15
Q
Interferences
A
16
Q
Spectral Interferences
A
17
Q
Environmental Interferences
A
18
Q
Results: peak separation
table
A
19
Q
Results: peak separation
poor fitting
A
20
Q
Quantitative analysis
A
21
Q
Different elements = different sensitivities
A
22
Q
Relative Sensitivity factors
A
23
Q
Diagram of preparatory steps prior to TXRF analysis
A
24
Q
Internal standardization vs. external standardization
A
25
Some applications of TXRF
26
Methods of sample preparation
27
Sample preparation
special support
28
Sample preparation Spectra of a quartz
29
Properties of sample carrier material
30
Applications for TXRF analysis
31
Water analysis
32
Aerosol analysis
definition
33
Aerosol analysis
origin
34
Aerosol analysis
climate
35
1. Sampling procedure: impact of size of species
36
Airborne particulates
37
Plant material
38
Vegetable and essential oils
39
Medical and clinical applications
40
Tissue samples
41
High purity chemicals
42
Other applications
43
Silicon wafer analysis
44
Direct TXRF - wafer mapping
45
TXRF @ IMEC
46
Monitoring of process equipment
47
Contamination control: TXRF metrology
48
The problem
of Ruthenium
49
A solution?
50
TXRF Instrumentation
51
By adjustment monochromator
52
Results: spectra
53
Evaluation performance
54
Detection limits for (T)XRF
55
Detection limit
56
Conditions and limitations
57
Pro and Con of TXRF
benefits and drawbacks
58
Pro and Con of TXRF
advantages and requirements
59
Comparison of analysis techniques
60
Performance comparison
61
Detection of light elements
62
Unified measurement angle
63
Vapor Phase Treatment (VPT) - TXRF
64
Pre concentration techniques
65
Preconcentration: general concept
66
Straight -TXRF
67
The Principle of VPD-DC
68
Vapor Phase Decomposition – Droplet Collection
69
Preconcentration Efficiency (Ec )
70
Impact of the VPD-DC Collection Chemistry
71
The copper problem!
72
Matrix effects
73
Conditions and limitations
74
Why SR-TXRF?
75
Brilliance
76
Bending magnet
77
Ultra-clean wafers
78
Wafer Mapping
79
Principles wafer mapping - TXRF
80
Examples WM-TXRF (2)
