Toho Technology

Question 1

Scan Range

Answer 1

Programmable up to 200mm

Question 2

Measurement Range

Answer 2

1 to 4,000MPa (For oxide filler on Si wafer)

Question 3

Repeatability

Answer 3

1.3MPa

Question 4

Accuracy

Answer 4

Less than 2.5% or 1MPa

Question 5

Minimum Radius

Answer 5

2.0m

Question 6

Maximum Radius

Answer 6

33km

Question 7

Wafer Sizes (mm)

Answer 7

25mm, 50mm, 75mm, 100mm, 125mm, 150mm, 200mm

Question 8

Minimum Scan Step

Answer 8

0.02mm

Question 9

What wave length are the lasers?

Answer 9

670nm / 780 nm

Question 10

What is the laser power rating?

Answer 10

4mW

Question 11

Heating rates

Answer 11

up to 25˚c per minute

Question 12

What does the cooling unit use?

Answer 12

LN2

Question 13

What does WinFLX recalculate?

Answer 13

Automatic recalculation of stress when film or substrate thickness is corrected

Question 14

What is dual wavelength technology?

Answer 14

Enables the system to select the wavelength most suitable for challenging films such as silicon nitride

Question 15

Name 5 data analyst features of WinFLX

Answer 15

1) Biaxial modulus of elasticity
2) Linear expansion coefficient
3) File subtraction
4) Trend plotting
5) Calculation of water diffusion coefficient in dielectric film

Question 16

Name at least 4 stress related problems

Answer 16

1) Aluminum stress-induced void
2) Passivation cracking (nitride oxide)
3) Stress-induced dislocations in Si
4) Tungsten Silicide cracking
5) Stress increase in oxides during temperature cycling
6) Matching metallization expansion on GaAs
7) Si cracking due to high film stress

Question 17

What wafer sizes can be measured?

Answer 17

50mm (optional), 75 mm,
100mm, 125mm, 150mm, and
200mm

Question 18

Maximum Points per scan?

Answer 18

1250

Question 19

Weight of the system? (kg & lbs.)

Answer 19

45.5kg & 100lbs.

Question 20

Scan range for the 4 systems

Answer 20

FLX-2320-S: 200mm
FLX-2320-R: 200mm
FLX-3300-T: 300mm
FLX-3300-R: 300mm

Question 21

Which systems have automatic 3-D mapping?

Answer 21

FLX-2320-R and FLX-3300-R

Question 22

Which systems have manual 3-D mapping?

Answer 22

FLX-2320-S and FLX-3300-T

Question 23

What are the sample sizes of the systems?

Answer 23

FLX-2320-S: 75-200mmØ FLX-2320-R: 75-200mmØ
FLX-3300-T: 150mmØ, 200mmØ, 300mmØ
FLX-3300-R: 150mmØ, 200mmØ, 300mmØ

Question 24

25mm is equal to how many inches?

Answer 24

1”

Question 25

50mm is equal to how many inches?

Answer 25

2"

Question 26

75mm is equal to how many inches

Answer 26

3"

Question 27

100mm is equal to how many inches?

Answer 27

4"

Question 28

125mm is equal to how many inches?

Answer 28

5"

Question 29

150mm is equal to how many inches?

Answer 29

6"

Question 30

200mm is equal to how many inches?

Answer 30

8"

Question 31

7 applications of the FPM series

Answer 31

1) Color Filter Pixel Volume on ODF process 2) Main PS and Sub PS on Touch Screen 3) ITO CD Overlay for Mask alignment 4) 3-D/CD inspection for Half-tone Exposure 5) Photo-Resist film thickness 6) Surface form and thickness of RGB filters 7) Volume, Form, Height of pixel for Ink Jet print control 5) photo-resist

Question 31

300mm is equal to how many inches?

Answer 31

12"

Question 32

TACT Time

Answer 32

2.5-5 sec FAAM; average 17 sec Glass

Question 33

Prep Uptime

Answer 33

>/= 95%

Question 34

Throughput?

Answer 34

40k glass/month (4-heads)

Question 35

Height Repro

Answer 35

.

Question 36

Lateral CD/OL Repro

Question 37

Head-to-Head Correlation

Question 38

Key technologies

Answer 38

1) High-speed SWLI 2) Surface profiling of transparent films 3) Custom 20x or 50x FPM objective 4) Large stage mecha-tronics 5) Micron Absolute positioning 6) High-speed motion with nanometer stability and micron absolute positioning

Question 39

What is the difference between the FP-10 and FP-20?

Answer 39

1) The FP-10 Measures up to 400mm x 500mm substrates while the FP-20 measures substrates larger than 400mm x 500mm 2) FP-10: the head is stationary, but the stage moves FP-20: The Head Moves, but the state is stationary

Question 40

Scan repeatability

Answer 40

10A for A type / 15A for X type

Question 41

X and Y repeatability

Answer 41

+/- 2um

Question 42

Scan length

Answer 42

30mm ~ 90mm with stress option

Question 43

Scan speed (FP Series)

Answer 43

1um / sec ~ 25um / sec

Question 44

Sampling Rate (FP series)

Answer 44

50 / 100 / 200 / sec

Question 45

Throat Height (FP series)

Answer 45

15 mm

Question 46

Vertical Range (FP series)

Answer 46

0-130um

Question 47

L - Stylis (FP series)

Answer 47

2um/60 degrees

Question 48

Stylus Force (FP-series)

Answer 48

0.5 mg - 15 mg

Question 49

Pattern Recognition

Answer 49

Manual/Auto optional

Question 50

Noise isolator (FP series)

Answer 50

Equipped

Question 51

What does the TohoSpec 3000 do?

Answer 51

Provide accurate film thickness measurements across a vast array of applications

Question 52

What kind of applications can the Toho 3000 measure?

Answer 52

1) LED 2) Solar 3) FPD/ LCD 4) OLED 5) Photomask 6) Power Device 7) SOI 8) Magnetic head for HDD

Question 53

What films can the TohoSpec 3000 measure?

Answer 53

All partially transparent films up to 100nm thick

Question 54

How many layers can the TohoSpec 3000 measure?

Answer 54

Guaranteed 3 layer measurements and in some cases beyond 3 depending on parameters

Question 55

What kind of sample information does the TohoSpec 3000 give?

Answer 55

Sequence of the film stack, film materials, and nominal thickness of each layer

Question 56

What are the substrates of the TohoSpec 3000?

Answer 56

Most smooth or semi-smooth surfaces with some reflectance

Question 57

What is the difference between the TohoSpec 3000 and the TohoSpec 3000T?

Answer 57

The TohoSpec 3000 is for most applications. 512 pixels/100A~30u The TohoSpec 3000T is the upgrade model for standard and thick film applications. 1024 pixels/100A~75u

Toho Technology (4 decks)

• Toho Technology
• FPM Series
• FP Series
• TohoSpec 3000