Reticale Type/Characteristic Flashcards Preview

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Flashcards in Reticale Type/Characteristic Deck (17):
1

A

A: Attenuated Phase-Shift

2

B

Binary

3

H

Hi-T

4

L

Leaky 82 Process

5

P

Strong Phase-Shift

6

R

Reflective Blank

7

T

Ternary

8

U

Chromeless

9

W

OMOG ( opaque MoSi On Glass) Blank

10

C

Subres Side Lobe Inhibitor

11

D

Dimple Line/Space Fill

12

E

Subres Binary Line/Space Fill

13

G

Subres Atenuated Line/Space Fill

14

M

Mfill

15

N

192nm 30% HiT

16

O

OPC

17

S

Subres Inrigger/Outrigger